A number of discussions--such as thin-resist modeling, metrics for imaging, thin-film optics, and the modeling of focus effects--first appeared in Advanced Micro Design internal reports. Students in my classes on lithography science will recognize many of the figures and equations. Other topics hav
| Title | : | Principles of Lithography, Second Edition (SPIE Press Monograph Vol. PM146) |
| Author | : | |
| Rating | : | 4.62 (601 Votes) |
| Asin | : | 0819456608 |
| Format Type | : | Hardcover |
| Number of Pages | : | 438Pages |
| Publish Date | : | 2015-2-30 |
| Language | : | English |
A number of discussions--such as thin-resist modeling, metrics for imaging, thin-film optics, and the modeling of focus effects--first appeared in Advanced Micro Design internal reports. Students in my classes on lithography science will recognize many of the figures and equations. Other topics have been added or significantly expanded, especially those concerning light sources, photomasks, and next-generation lithography. Some knowledge of resist chemistry is essential for using resists properly, but the emphasis here is on operational considerations. This is the approach I used in learning lithography and it is the method used here. Several also appear in the first chapter of the SPIE Handbook on Microlithography, Micromachining, and Microfabrication, Volume I: Microlithography, which I coauthored with Bill Arnold of ASM Lithography. The chapter on photoresists is approached from the perspective of the practicing lithographer, rather than the resist chemist. Numerous references to the literature in optical lithograpy will guide both novice and experienced lithographers who want greater detail in specific areas. Eventually, parts of these reports
This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. No topics will require knowledge of mathematics beyond elementary calculus.Contents - Preface - Overview of lithography - Optical pattern formation - Photoresists - Modeling and thin film effects - Wafer steppers - Color Plates overlay - Masks and reticules - Overcoming the diffraction limit - Metrology - The limits of optical lithography - Lithography costs - Alternative lithography techniques - Appendix A: Coherence - Index. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. Topics directly related to the tools used to manufacture integrated circuits areI think I may run into trouble doing the skin tones, as I really don't want them to be too dark. But knowing what comes next makes this book oh so satisfying. :). Eye opening for those of us who know nothing about nutrition! Especially vitamins. I just got finished watching the film, "Hillary's America," and I am also widely read in other books on this subject, and in my opinion this book is right on target, contrary to the one star reviews of "Amazon Customer" (July 18, 2016), D. I was excited to read about her adventure in local shopping.I’m impressed with the idea of the book but lacks perfect execution. Wonderful Hymns to choose from to play and share with others. Ben is a handsome, popular guy while Sophia is a plain wallflower. As for photos used for figures in the book, they are also well done, and of the proper brightness and contrast so that they are easy to view and comprehensible. Not a well written book and contains very general information about money laundering that most people are already aware of such as off-shore banking. It's been said that victors write history, but even being on the winning side isn't always enough. The desserts I made wLevinson has worked in microlithography for nearly two decades, at companies such as IBM, Sierra Semiconductor, and Advanced Micro Devices. . Harry J. He teaches courses in lithography science, process control, and total quality management. Dr. He has published many articles on lithography science, from thin film optical effects and metrics for imaging to overlay and process control
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